Linear Calibration and Temperature Compensation of Capacitive Pressure Sensor

This paper Discussed the use of least square method and the Newton interpolation method on the linear calibration and temperature compensation of capacitive pressure sensor.Mechanism which the nonlinear of capacitive pressure sensor signal and the temperature drift problem was analyzed.Using the least square method to correct the nonlinear of sensor output signal,and then using Newton interpolation method for temperature compensation.The results show that from -40 ℃ to 85 ℃ temperature range,it achieves 0.04% accuracy.